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In situ analysis of epitaxial Calcium fluoride thin films grown on Silicon
Heteroepitaxial growth of dielectrics films on Si substrates is of considerable interest in the formation of SOIstructuresand 3d -integrated circuits for microelectronic applications. CaF2 crystallizes in the cubic fluorite crystalstructure, which is closely related to the diamond structure of Si. I...
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| Publicado en: | Superficies y vacío |
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| Autores principales: | , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2001
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| Materias: | |
| Acceso en línea: | https://www.redalyc.org/articulo.oa?id=94201210 |
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