Caricamento...
In situ analysis of epitaxial Calcium fluoride thin films grown on Silicon
Heteroepitaxial growth of dielectrics films on Si substrates is of considerable interest in the formation of SOIstructuresand 3d -integrated circuits for microelectronic applications. CaF2 crystallizes in the cubic fluorite crystalstructure, which is closely related to the diamond structure of Si. I...
Salvato in:
| Pubblicato in: | Superficies y vacío |
|---|---|
| Autori principali: | , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2001
|
| Soggetti: | |
| Accesso online: | https://www.redalyc.org/articulo.oa?id=94201210 |
| Tags: |
Aggiungi Tag
Nessun Tag, puoi essere il primo ad aggiungerne! !
|