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In situ analysis of epitaxial Calcium fluoride thin films grown on Silicon
Heteroepitaxial growth of dielectrics films on Si substrates is of considerable interest in the formation of SOIstructuresand 3d -integrated circuits for microelectronic applications. CaF2 crystallizes in the cubic fluorite crystalstructure, which is closely related to the diamond structure of Si. I...
Tallennettuna:
| Julkaisussa: | Superficies y vacío |
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| Päätekijät: | , , |
| Aineistotyyppi: | Artigo |
| Kieli: | Inglês |
| Julkaistu: |
Sociedad Mexicana de Ciencia y Tecnología de Superficies y Materiales A.C.
2001
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| Aiheet: | |
| Linkit: | https://www.redalyc.org/articulo.oa?id=94201210 |
| Tagit: |
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