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High bandwidth piezoresistive force probes with integrated thermal actuation
We present high-speed force probes with on-chip actuation and sensing for the measurement of pN-scale forces at the microsecond time scale. We achieve a high resonant frequency in water (1–100 kHz) with requisite low spring constants (0.3–40 pN/nm) and low integrated force noise (1–100 pN) by target...
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| Autori principali: | , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
2012
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3500968/ https://ncbi.nlm.nih.gov/pubmed/23175616 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/0960-1317/22/9/095012 |
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