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Design optimization of piezoresistive cantilevers for force sensing in air and water

Piezoresistive cantilevers fabricated from doped silicon or metal films are commonly used for force, topography, and chemical sensing at the micro- and macroscales. Proper design is required to optimize the achievable resolution by maximizing sensitivity while simultaneously minimizing the integrate...

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Autori principali: Doll, Joseph C., Park, Sung-Jin, Pruitt, Beth L.
Natura: Artigo
Lingua:Inglês
Pubblicazione: American Institute of Physics 2009
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC2768329/
https://ncbi.nlm.nih.gov/pubmed/19865512
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3224965
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