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Design optimization of piezoresistive cantilevers for force sensing in air and water
Piezoresistive cantilevers fabricated from doped silicon or metal films are commonly used for force, topography, and chemical sensing at the micro- and macroscales. Proper design is required to optimize the achievable resolution by maximizing sensitivity while simultaneously minimizing the integrate...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
American Institute of Physics
2009
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2768329/ https://ncbi.nlm.nih.gov/pubmed/19865512 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3224965 |
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