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Self-heating in piezoresistive cantilevers
We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperatu...
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| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Institute of Physics
2011
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3129336/ https://ncbi.nlm.nih.gov/pubmed/21731884 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1063/1.3595485 |
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