A carregar...
Piezoresistive Cantilever Performance—Part II: Optimization
Piezoresistive silicon cantilevers fabricated by ion implantation are frequently used for force, displacement, and chemical sensors due to their low cost and electronic readout. However, the design of piezoresistive cantilevers is not a straightforward problem due to coupling between the design para...
Na minha lista:
| Main Authors: | , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2010
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2843105/ https://ncbi.nlm.nih.gov/pubmed/20333323 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/JMEMS.2009.2036582 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|