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A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection (†)
In order to effectively increase the resonance frequency and the quality factor of atomic force microscope (AFM) probes, a novel oscillating probe based on a dog-bone shaped MEMS resonator was conceived, designed, fabricated and evaluated. The novel probe with 400 μm in length, 100 μm in width and 5...
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| Publicat a: | Sensors (Basel) |
|---|---|
| Autors principals: | , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2014
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4279505/ https://ncbi.nlm.nih.gov/pubmed/25365463 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s141120667 |
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