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Sensitivity Improvement to Active Piezoresistive AFM Probes Using Focused Ion Beam Processing
This paper presents a comprehensive modeling and experimental verification of active piezoresistive atomic force microscopy (AFM) cantilevers, which are the technology enabling high-resolution and high-speed surface measurements. The mechanical structure of the cantilevers integrating Wheatstone pie...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2019
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC6832718/ https://ncbi.nlm.nih.gov/pubmed/31614863 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s19204429 |
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