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Piezoresistive AFM cantilevers surpassing standard optical beam deflection in low noise topography imaging
Optical beam deflection (OBD) is the most prevalent method for measuring cantilever deflections in atomic force microscopy (AFM), mainly due to its excellent noise performance. In contrast, piezoresistive strain-sensing techniques provide benefits over OBD in readout size and the ability to image in...
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| Veröffentlicht in: | Sci Rep |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Nature Publishing Group
2015
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4647226/ https://ncbi.nlm.nih.gov/pubmed/26574164 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep16393 |
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