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Analysis methods for meso- and macroporous silicon etching baths
Analysis methods for electrochemical etching baths consisting of various concentrations of hydrofluoric acid (HF) and an additional organic surface wetting agent are presented. These electrolytes are used for the formation of meso- and macroporous silicon. Monitoring the etching bath composition req...
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| Asıl Yazarlar: | , , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Springer
2012
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| Konular: | |
| Online Erişim: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3443038/ https://ncbi.nlm.nih.gov/pubmed/22805742 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-7-398 |
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