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An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer
A resonant microbeam accelerometer of a novel highly symmetric structure based on MEMS bulk-silicon technology is proposed and some numerical modeling results for this scheme are presented. The accelerometer consists of two proof masses, four supporting hinges, two anchors, and a vibrating triple be...
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| Hlavní autoři: | , , , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Molecular Diversity Preservation International (MDPI)
2009
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3345835/ https://ncbi.nlm.nih.gov/pubmed/22573956 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s90301330 |
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