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Design and Implementation of a Micromechanical Silicon Resonant Accelerometer
The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic range, anti-interference capacity and good sta...
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| Main Authors: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Molecular Diversity Preservation International (MDPI)
2013
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3871141/ https://ncbi.nlm.nih.gov/pubmed/24256978 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s131115785 |
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