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Atomic scale investigation of silicon nanowires and nanoclusters

In this study, we have performed nanoscale characterization of Si-clusters and Si-nanowires with a laser-assisted tomographic atom probe. Intrinsic and p-type silicon nanowires (SiNWs) are elaborated by chemical vapor deposition method using gold as catalyst, silane as silicon precursor, and diboran...

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Detalhes bibliográficos
Main Authors: Roussel, Manuel, Chen, Wanghua, Talbot, Etienne, Lardé, Rodrigue, Cadel, Emmanuel, Gourbilleau, Fabrice, Grandidier, Bruno, Stiévenard, Didier, Pareige, Philippe
Formato: Artigo
Idioma:Inglês
Publicado em: Springer 2011
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC3211335/
https://ncbi.nlm.nih.gov/pubmed/21711788
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-6-271
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