Loading...

A compact model for early electromigration failures of copper dual-damascene interconnects

A compact model for early electromigration failures in copper dual-damascene interconnects is proposed. The model is based on the combination of a complete void nucleation model together with a simple mechanism of slit void growth under the via. It is demonstrated that the early electromigration lif...

Fuld beskrivelse

Na minha lista:
Bibliografiske detaljer
Main Authors: de Orio, R.L., Ceric, H., Selberherr, S.
Format: Artigo
Sprog:Inglês
Udgivet: Pergamon Press 2011
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC3178013/
https://ncbi.nlm.nih.gov/pubmed/21966026
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.microrel.2011.07.049
Tags: Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!