Titanium-silicon oxide film structures for polarization-modulated infrared reflection absorption spectroscopy

We present a titanium-silicon oxide film structure that permits polarization modulated infrared reflection absorption spectroscopy on silicon oxide surfaces. The structure consists of a ~6 nm sputtered silicon oxide film on a ~200 nm sputtered titanium film. Characterization using conventional and s...

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Bibliographic Details
Main Authors: Dunlop, Iain E., Zorn, Stefan, Richter, Gunther, Srot, Vesna, Kelsch, Marion, van Aken, Peter A., Skoda, Maximilian, Gerlach, Alexander, Spatz, Joachim P., Schreiber, Frank
Format: Artigo
Language:Inglês
Published: 2009
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Article
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC2858595/
https://ncbi.nlm.nih.gov/pubmed/20418963
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.tsf.2008.10.058
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