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Titanium-silicon oxide film structures for polarization-modulated infrared reflection absorption spectroscopy
We present a titanium-silicon oxide film structure that permits polarization modulated infrared reflection absorption spectroscopy on silicon oxide surfaces. The structure consists of a ~6 nm sputtered silicon oxide film on a ~200 nm sputtered titanium film. Characterization using conventional and s...
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| Autori principali: | , , , , , , , , , |
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| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
2009
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2858595/ https://ncbi.nlm.nih.gov/pubmed/20418963 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.tsf.2008.10.058 |
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