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Molecular Depth Profiling using a C(60) Cluster Beam: the Role of Impact Energy
Molecular depth profiling of organic overlayers was performed using a mass selected C(60) ion beam in conjunction with time-of-flight (TOF-SIMS) mass spectrometry. The characteristics of sputter depth profiles acquired for a 300-nm Trehalose film on silicon were studied as a function of the kinetic...
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Hauptverfasser: | , , |
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Format: | Artigo |
Sprache: | Inglês |
Veröffentlicht: |
2008
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Schlagworte: | |
Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2662745/ https://ncbi.nlm.nih.gov/pubmed/19855815 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/jp8049763 |
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