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Energy Deposition during Molecular Depth Profiling Experiments with Cluster Ion Beams
The role of the location of energy deposition during cluster ion bombardment on the quality of molecular depth profiling was examined by varying the incident angle geometry. Cholesterol films ∼300 nm in thickness deposited onto silicon substrates were eroded using 40-keV C(60)(+) at incident angles...
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| Hlavní autoři: | , , |
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| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
2008
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC2553714/ https://ncbi.nlm.nih.gov/pubmed/18549239 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/ac8002962 |
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