Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses

Minimizing conductive heat losses in Micro-Electro-Mechanical-Systems (MEMS) thermal (hot-film) flow sensors is the key to minimize the sensors’ power consumption and maximize their sensitivity. Through a comprehensive review of literature on MEMS thermal (calorimetric, time of flight, hot...

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Main Authors: Zahid Mehmood, Ibraheem Haneef, Syed Zeeshan Ali, Florin Udrea
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2019-04-01
Colecção:Sensors
Assuntos:
MEMS thermal flow sensors
review
conduction losses
heater/hot-film
membrane shape
membrane to heater ratio
silicon-on-insulator (SOI)
complementary metal oxide semiconductor (CMOS)
Acesso em linha:https://www.mdpi.com/1424-8220/19/8/1860
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