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An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications †
An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperat...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5134430/ https://ncbi.nlm.nih.gov/pubmed/27827904 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16111608 |
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