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Mechanical Deformation Induced in Si and GaN Under Berkovich Nanoindentation

<p>Abstract</p><p>Details of Berkovich nanoindentation-induced mechanical deformation mechanisms of single-crystal Si(100) and the metal-organic chemical-vapor deposition (MOCVD) derived GaN thin films have been systematic investigated by means of micro-Raman spectroscopy and cross...

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Détails bibliographiques
Auteur principal: Jian Sheng-Rui
Format: Artigo
Langue:Inglês
Publié: SpringerOpen 2007-01-01
Collection:Nanoscale Research Letters
Sujets:
Si
GaN
Accès en ligne:http://dx.doi.org/10.1007/s11671-007-9106-0
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