Structural Optimization and Mechanical Simulation of MEMS Thin-Film Getter–Heater Unit

A MEMS thin-film getter–heater unit has been previously proposed for the vacuum packaging of a Micro-Electro-Mechanical System (MEMS) device, where the floating structure (FS) design is found to be obviously more power-efficient than the solid structure (SS) one by heat transfer capacity simulation....

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Autori principali:	Xinlin Peng, Yucheng Ji, Shuo Chen, Song Guo, Liuhaodong Feng, Yang Xu, Shinan Wang
Natura:	Artigo
Lingua:	Inglês
Pubblicazione:	MDPI AG 2022-12-01
Serie:	Micromachines
Soggetti:	MEMS getter–heater unit cantilever model symmetrically-shaped heater and edge–center-located cantilever structure stress and deformation displacement simulation interfacial stress simulation
Accesso online:	https://www.mdpi.com/2072-666X/13/12/2252
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