Comparative study of titanium, platinum, and titanium nitride thin films for micro-elecrto mechanical systems (MEMS) based micro-heaters
This paper presents a comparative study of titanium (Ti), platinum (Pt), and titanium nitride (TiN) micro-electro mechanical systems based micro-heaters. In the present study, a common geometry and thin film thicknesses were selected to achieve comparable base resistances for all three microheater m...
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| Auteurs principaux: | , , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
AIP Publishing LLC
2022-09-01
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| Collection: | AIP Advances |
| Accès en ligne: | http://dx.doi.org/10.1063/6.0001892 |
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