Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications
Mastering non-evaporable getter (NEG) thin films by elucidating their activation mechanisms and predicting their sorption performances will contribute to facilitating their integration into micro-electro-mechanical systems (MEMS). For this aim, thin film based getters structured in single and multi-...
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| Principais autores: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI AG
2018-09-01
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| coleção: | Micromachines |
| Assuntos: | |
| Acesso em linha: | http://www.mdpi.com/2072-666X/9/10/490 |
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