Activation of Zr, ZrVHf and TiZrV Non-Evaporative Getters Characterized by In Situ Synchrotron Radiation Photoemission Spectroscopy

The activation process of Zr, ZrVHf and TiZrV non-evaporative getter (NEG) thin films, prepared by direct current magnetron sputtering, is investigated by in situ synchrotron radiation photoemission spectroscopy. The activation temperatures of Zr and ZrVHf films are found to be 300 °C and 200 °C, re...

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Bibliografische Detailangaben

Hauptverfasser:	Yuchen Yang, Yongsheng Ma, Jia’ou Wang, Tao Huang, Baiqi Liu, Fei Sun, Xujian Wang, Shuangkai Chen, Zilin Chen, Xiaohua Peng, Haiyi Dong, Ping He
Format:	Artigo
Sprache:	Inglês
Veröffentlicht:	MDPI AG 2021-05-01
Schriftenreihe:	Applied Sciences
Schlagworte:	non-evaporative getters activation thin films SRPES
Online-Zugang:	https://www.mdpi.com/2076-3417/11/11/4844
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