TECHNOLOGICAL ASPECTS REGARDING THE USE OF PHOTOLITOGRAPHY IN OBTAINING MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS)
Micro-electro-mechanical systems (MEMS) include a vast area corresponding to the technological development in the last decades. MEMS are included in a multitude of areas, almost in everything that surrounds us. This aids of small dimensions and high tech are increasingly present in our daily life....
Kaydedildi:
| Asıl Yazarlar: | , |
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| Materyal Türü: | Artigo |
| Dil: | Inglês |
| Baskı/Yayın Bilgisi: |
Editura Politehnica, Timisoara
2017-03-01
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| Seri Bilgileri: | Nonconventional Technologies Review |
| Konular: | |
| Online Erişim: | http://www.revtn.ro/index.php/revtn/article/view/166 |
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