TECHNOLOGICAL ASPECTS REGARDING THE USE OF PHOTOLITOGRAPHY IN OBTAINING MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS)
Micro-electro-mechanical systems (MEMS) include a vast area corresponding to the technological development in the last decades. MEMS are included in a multitude of areas, almost in everything that surrounds us. This aids of small dimensions and high tech are increasingly present in our daily life....
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| Principais autores: | , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Editura Politehnica, Timisoara
2017-03-01
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| Colecção: | Nonconventional Technologies Review |
| Assuntos: | |
| Acesso em linha: | http://www.revtn.ro/index.php/revtn/article/view/166 |
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