Optimization of the resonant frequency MEMS pressure sensor based on numerical simulation
Silicon microelectromechanical pressure sensors of the resonant-frequency type are distinguished by high linearity and stability of their output characteristics, making them particularly promising for precision measurements. This paper presents a study of the influence of membrane geometry and stres...
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| Principais autores: | , , , , |
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| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
ITMO University
2025-12-01
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| Serier: | Научно-технический вестник информационных технологий, механики и оптики |
| Fag: | |
| Online adgang: | https://ntv.elpub.ru/jour/article/view/539 |
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