Optimization of the resonant frequency MEMS pressure sensor based on numerical simulation
Silicon microelectromechanical pressure sensors of the resonant-frequency type are distinguished by high linearity and stability of their output characteristics, making them particularly promising for precision measurements. This paper presents a study of the influence of membrane geometry and stres...
Guardado en:
| Autores principales: | , , , , |
|---|---|
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
ITMO University
2025-12-01
|
| Colección: | Научно-технический вестник информационных технологий, механики и оптики |
| Materias: | |
| Acceso en línea: | https://ntv.elpub.ru/jour/article/view/539 |
| Etiquetas: |
Sin Etiquetas, Sea el primero en etiquetar este registro!
|