Optimization of the resonant frequency MEMS pressure sensor based on numerical simulation
Silicon microelectromechanical pressure sensors of the resonant-frequency type are distinguished by high linearity and stability of their output characteristics, making them particularly promising for precision measurements. This paper presents a study of the influence of membrane geometry and stres...
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| Principais autores: | , , , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
ITMO University
2025-12-01
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| coleção: | Научно-технический вестник информационных технологий, механики и оптики |
| Assuntos: | |
| Acesso em linha: | https://ntv.elpub.ru/jour/article/view/539 |
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