Optimization of the resonant frequency MEMS pressure sensor based on numerical simulation
Silicon microelectromechanical pressure sensors of the resonant-frequency type are distinguished by high linearity and stability of their output characteristics, making them particularly promising for precision measurements. This paper presents a study of the influence of membrane geometry and stres...
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| Główni autorzy: | , , , , |
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| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
ITMO University
2025-12-01
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| Seria: | Научно-технический вестник информационных технологий, механики и оптики |
| Hasła przedmiotowe: | |
| Dostęp online: | https://ntv.elpub.ru/jour/article/view/539 |
| Etykiety: |
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