Spatial Atomic Layer Deposition for Energy and Electronic Devices
Functional thin films play a critical role in efforts toward efficient devices for energy conversion and storage, as well as low-loss electronics. These films need to be manufactured at scale, cost-effectively, and with precision. Atmospheric pressure spatial atomic layer deposition (AP-SALD) has em...
Enregistré dans:
| Auteurs principaux: | , , , , , , |
|---|---|
| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
American Physical Society
2025-02-01
|
| Collection: | PRX Energy |
| Accès en ligne: | http://doi.org/10.1103/PRXEnergy.4.017002 |
| Tags: |
Pas de tags, Soyez le premier à ajouter un tag!
|