Spatial Atomic Layer Deposition for Energy and Electronic Devices
Functional thin films play a critical role in efforts toward efficient devices for energy conversion and storage, as well as low-loss electronics. These films need to be manufactured at scale, cost-effectively, and with precision. Atmospheric pressure spatial atomic layer deposition (AP-SALD) has em...
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| Autores principales: | , , , , , , |
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| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
American Physical Society
2025-02-01
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| Colección: | PRX Energy |
| Acceso en línea: | http://doi.org/10.1103/PRXEnergy.4.017002 |
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