Spatial Atomic Layer Deposition for Energy and Electronic Devices
Functional thin films play a critical role in efforts toward efficient devices for energy conversion and storage, as well as low-loss electronics. These films need to be manufactured at scale, cost-effectively, and with precision. Atmospheric pressure spatial atomic layer deposition (AP-SALD) has em...
Na minha lista:
| Principais autores: | , , , , , , |
|---|---|
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
American Physical Society
2025-02-01
|
| coleção: | PRX Energy |
| Acesso em linha: | http://doi.org/10.1103/PRXEnergy.4.017002 |
| Tags: |
Sem tags, seja o primeiro a adicionar uma tag!
|