Spatial Atomic Layer Deposition for Energy and Electronic Devices
Functional thin films play a critical role in efforts toward efficient devices for energy conversion and storage, as well as low-loss electronics. These films need to be manufactured at scale, cost-effectively, and with precision. Atmospheric pressure spatial atomic layer deposition (AP-SALD) has em...
Сохранить в:
| Главные авторы: | , , , , , , |
|---|---|
| Формат: | Artigo |
| Язык: | Inglês |
| Опубликовано: |
American Physical Society
2025-02-01
|
| Серии: | PRX Energy |
| Online-ссылка: | http://doi.org/10.1103/PRXEnergy.4.017002 |
| Метки: |
Нет меток, Требуется 1-ая метка записи!
|