Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators
This work presents a thermoelectric micro generator fabricated by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-CMOS process. The micro generator is composed of 24 thermocouples in series. Each thermocouple is constructed by p-type and n-type polysilicon...
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| Główni autorzy: | , , , |
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| Format: | Artigo |
| Język: | Inglês |
| Wydane: |
MDPI AG
2010-02-01
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| Seria: | Sensors |
| Hasła przedmiotowe: | |
| Dostęp online: | http://www.mdpi.com/1424-8220/10/2/1315/ |
| Etykiety: |
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