Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts

Synthesis of the vertically aligned carbon nanotubes (CNTs) using complementary metal-oxide-semiconductor (CMOS)-compatible methods is essential to integrate the CNT contact and interconnect to nanoscale devices and ultra-dense integrated nanoelectronics. However, the synthesis of high-density CNT a...

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Hlavní autoři:	Zichao Ma, Shaolin Zhou, Changjian Zhou, Ying Xiao, Suwen Li, Mansun Chan
Médium:	Artigo
Jazyk:	Inglês
Vydáno:	MDPI AG 2020-09-01
Edice:	Nanomaterials
Témata:	carbon nanotube CMOS-compatible catalyst design interconnect
On-line přístup:	https://www.mdpi.com/2079-4991/10/10/1918
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