Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts
Synthesis of the vertically aligned carbon nanotubes (CNTs) using complementary metal-oxide-semiconductor (CMOS)-compatible methods is essential to integrate the CNT contact and interconnect to nanoscale devices and ultra-dense integrated nanoelectronics. However, the synthesis of high-density CNT a...
में बचाया:
| मुख्य लेखकों: | , , , , , |
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| स्वरूप: | Artigo |
| भाषा: | Inglês |
| प्रकाशित: |
MDPI AG
2020-09-01
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| श्रृंखला: | Nanomaterials |
| विषय: | |
| ऑनलाइन पहुंच: | https://www.mdpi.com/2079-4991/10/10/1918 |
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