Synthesis of Vertical Carbon Nanotube Interconnect Structures Using CMOS-Compatible Catalysts

Synthesis of the vertically aligned carbon nanotubes (CNTs) using complementary metal-oxide-semiconductor (CMOS)-compatible methods is essential to integrate the CNT contact and interconnect to nanoscale devices and ultra-dense integrated nanoelectronics. However, the synthesis of high-density CNT a...

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Principais autores:	Zichao Ma, Shaolin Zhou, Changjian Zhou, Ying Xiao, Suwen Li, Mansun Chan
格式:	Artigo
語言:	Inglês
出版:	MDPI AG 2020-09-01
叢編:	Nanomaterials
主題:	carbon nanotube CMOS-compatible catalyst design interconnect
在線閱讀:	https://www.mdpi.com/2079-4991/10/10/1918
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