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Structural and Electrical Properties of Annealed Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> Films Grown on Flexible Polyimide

The morphological, structural, and electrical properties of as-grown and annealed Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> (GST) layers, deposited by RF-sputtering on flexible polyimide, were studied by means of optical microscopy, atomic force microscopy, X-ray diffraction, Raman spectroscopy, an...

Ausführliche Beschreibung

Gespeichert in:
Hauptverfasser: Marco Bertelli, Adriano Díaz Fattorini, Sara De Simone, Sabrina Calvi, Riccardo Plebani, Valentina Mussi, Fabrizio Arciprete, Raffaella Calarco, Massimo Longo
Format: Artigo
Sprache:Inglês
Veröffentlicht: MDPI AG 2022-06-01
Schriftenreihe:Nanomaterials
Schlagworte:
PCM
Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub>
sputtering
flexible substrates
crystallization
electrical properties
Online-Zugang:https://www.mdpi.com/2079-4991/12/12/2001
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