Development of a Novel Design and Modeling of MEMS Piezoelectric Cantilever-Based Chemical Sensors
The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was u...
שמור ב:
| Principais autores: | , , |
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| פורמט: | Artigo |
| שפה: | Inglês |
| יצא לאור: |
MDPI AG
2023-10-01
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| סדרה: | Engineering Proceedings |
| נושאים: | |
| גישה מקוונת: | https://www.mdpi.com/2673-4591/56/1/105 |
| תגים: |
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