Development of a Novel Design and Modeling of MEMS Piezoelectric Cantilever-Based Chemical Sensors
The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was u...
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| Автори: | , , |
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| Формат: | Artigo |
| Мова: | Inglês |
| Опубліковано: |
MDPI AG
2023-10-01
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| Серія: | Engineering Proceedings |
| Предмети: | |
| Онлайн доступ: | https://www.mdpi.com/2673-4591/56/1/105 |
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