Development of a Novel Design and Modeling of MEMS Piezoelectric Cantilever-Based Chemical Sensors
The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was u...
Guardado en:
| Autores principales: | , , |
|---|---|
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI AG
2023-10-01
|
| Colección: | Engineering Proceedings |
| Materias: | |
| Acceso en línea: | https://www.mdpi.com/2673-4591/56/1/105 |
| Etiquetas: |
Sin Etiquetas, Sea el primero en etiquetar este registro!
|