Development of a Novel Design and Modeling of MEMS Piezoelectric Cantilever-Based Chemical Sensors
The analytical modeling of thin-film, multilayered piezoelectric microcantilevers is presented in this work. Piezoelectric microcantilevers were used in chemical sensors. Different types of probe coatings were applied to these types of microcantilevers. A position-sensitive sensor (PSS) system was u...
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| Autors principals: | , , |
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| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI AG
2023-10-01
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| Col·lecció: | Engineering Proceedings |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2673-4591/56/1/105 |
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