Scaling of piezoelectric in-plane NEMS: Towards nanoscale integration of AlN-based transducer on vertical sidewalls
One of the key advantages of Piezoelectric MEMS (PiezoMEMS) is its scalability, overcoming issues commonly associated with alternative transduction methods. However, the breadth and depth of studies on scaling the fabrication process from PiezoMEMS to NEMS (Nano-Electro-Mechanical Systems) remain li...
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| Auteurs principaux: | , , , |
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| Format: | Artigo |
| Langue: | Inglês |
| Publié: |
Elsevier
2024-08-01
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| Collection: | Materials & Design |
| Sujets: | |
| Accès en ligne: | http://www.sciencedirect.com/science/article/pii/S0264127524004908 |
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