Navigating plasma etching of photonic chips in shared cleanrooms: a practical tutorial for researchers
The research and commercialization of integrated photonic devices have seen rapid growth, driven by their broad applicability and importance in both technological innovation and fundamental research. Among the key steps in the fabrication of such devices, plasma etching plays a critical role in fabr...
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| Glavni autor: | |
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| Format: | Artigo |
| Jezik: | Inglês |
| Izdano: |
IOP Publishing
2025-01-01
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| Serija: | JPhys Photonics |
| Teme: | |
| Online pristup: | https://doi.org/10.1088/2515-7647/ae0ee5 |
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