Passivation of a Conductive System of Integrated Circuits with a Layer of Aluminum Nitride
Passivation of the film conductive system of integrated circuits makes it more reliable by increasing the resistance to electromigration. The problem of manufacturing a passivating layer on the formed current-conducting system of an integrated circuit, obtained in a single technological cycle, inclu...
Uloženo v:
| Hlavní autor: | |
|---|---|
| Médium: | Artigo |
| Jazyk: | Russo |
| Vydáno: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-06-01
|
| Edice: | Доклады Белорусского государственного университета информатики и радиоэлектроники |
| Témata: | |
| On-line přístup: | https://doklady.bsuir.by/jour/article/view/3641 |
| Tagy: |
Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!
|