Passivation of a Conductive System of Integrated Circuits with a Layer of Aluminum Nitride
Passivation of the film conductive system of integrated circuits makes it more reliable by increasing the resistance to electromigration. The problem of manufacturing a passivating layer on the formed current-conducting system of an integrated circuit, obtained in a single technological cycle, inclu...
-д хадгалсан:
| Үндсэн зохиолч: | |
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| Формат: | Artigo |
| Хэл сонгох: | Russo |
| Хэвлэсэн: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-06-01
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| Цуврал: | Доклады Белорусского государственного университета информатики и радиоэлектроники |
| Нөхцлүүд: | |
| Онлайн хандалт: | https://doklady.bsuir.by/jour/article/view/3641 |
| Шошгууд: |
Шошго байхгүй, Энэхүү баримтыг шошголох эхний хүн болох!
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