Passivation of a Conductive System of Integrated Circuits with a Layer of Aluminum Nitride
Passivation of the film conductive system of integrated circuits makes it more reliable by increasing the resistance to electromigration. The problem of manufacturing a passivating layer on the formed current-conducting system of an integrated circuit, obtained in a single technological cycle, inclu...
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| Format: | Artigo |
| Idioma: | Russo |
| Publicat: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-06-01
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| Col·lecció: | Доклады Белорусского государственного университета информатики и радиоэлектроники |
| Matèries: | |
| Accés en línia: | https://doklady.bsuir.by/jour/article/view/3641 |
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