Passivation of a Conductive System of Integrated Circuits with a Layer of Aluminum Nitride
Passivation of the film conductive system of integrated circuits makes it more reliable by increasing the resistance to electromigration. The problem of manufacturing a passivating layer on the formed current-conducting system of an integrated circuit, obtained in a single technological cycle, inclu...
Na minha lista:
| Autor principal: | |
|---|---|
| Formato: | Artigo |
| Idioma: | Russo |
| Publicado em: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-06-01
|
| Colecção: | Доклады Белорусского государственного университета информатики и радиоэлектроники |
| Assuntos: | |
| Acesso em linha: | https://doklady.bsuir.by/jour/article/view/3641 |
| Tags: |
Sem tags, seja o primeiro a adicionar uma tag!
|