In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS
Abstract A novel design that utilizes aluminum nitride (AlN) piezoelectric thin films deposited on vertical surfaces for lateral motion and sensing is a step toward emerging multi‐axial microelectromechanical systems (MEMS). This work demonstrates the fabrication process and potential applications o...
Gorde:
| Egile Nagusiak: | , , , , |
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| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Wiley-VCH
2023-08-01
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| Saila: | Advanced Electronic Materials |
| Gaiak: | |
| Sarrera elektronikoa: | https://doi.org/10.1002/aelm.202300015 |
| Etiketak: |
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